Skip navigation
Skip navigation

Plasma ammonia passivation of SiN/SiO2/Si stacks

CollectionsANU Research Publications
Date published: 2006
Type: Conference paper


File Description SizeFormat Image
01_Jin_Plasma_ammonia_passivation_of_2006.pdf148.49 kBAdobe PDFThumbnail

Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  19 May 2020/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator