Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas
Particle in cell (PIC) simulations are employed to investigate the effect of excitation frequency ω on electron energy distribution functions(EEDFs) in a low pressure radio frequency (rf)discharge. The discharge is maintained over a length of 0.10 m, bounded by two infinite parallel plates, with the coherent heating field localized at the center of the discharge over a distance of 0.05 m and applied perpendicularly along the y and z directions. On varying the excitation frequency f (=ω/2π) in...[Show more]
|Collections||ANU Research Publications|
|Source:||Physics of Plasmas|
|01_Bhattacharjee_Investigation_of_effect_of_2011.pdf||Published Version||2.43 MB||Adobe PDF|
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