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Investigation of effect of excitation frequency on electron energy distribution functions in low pressure radio frequency bounded plasmas

Bhattacharjee, Sudeep; Lafleur, Trevor; Charles, Christine; Boswell, Rod


Particle in cell (PIC) simulations are employed to investigate the effect of excitation frequency ω on electron energy distribution functions(EEDFs) in a low pressure radio frequency (rf)discharge. The discharge is maintained over a length of 0.10 m, bounded by two infinite parallel plates, with the coherent heating field localized at the center of the discharge over a distance of 0.05 m and applied perpendicularly along the y and z directions. On varying the excitation frequency f (=ω/2π) in...[Show more]

CollectionsANU Research Publications
Date published: 2011-07-05
Type: Journal article
Source: Physics of Plasmas
DOI: 10.1063/1.3605021


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