Bhattacharjee, Sudeep; Lafleur, Trevor; Charles, Christine; Boswell, Rod
Particle in cell (PIC) simulations are employed to investigate the effect of excitation frequency ω on electron energy distribution functions(EEDFs) in a low pressure radio frequency (rf)discharge. The discharge is maintained over a length of 0.10 m, bounded by two infinite parallel plates, with the coherent heating field localized at the center of the discharge over a distance of 0.05 m and applied perpendicularly along the y and z directions. On varying the excitation frequency f (=ω/2π) in...[Show more]
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