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Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Lafleur, T.; Boswell, R. W.; Booth, J. P.


Through the use of particle-in-cell simulations, we demonstrate that the power deposition in capacitively coupled discharges (in argon) can be increased by replacing sinusoidal waveforms with Gaussian-shaped voltage pulses (with a repetition frequency of 13.56 MHz). By changing the Gaussian pulse width, electron heating can be directly controlled, allowing for an increased plasma density and ion flux for the same gas pressure and geometrical operating conditions. Analysis of the power...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.4712128


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