Skip navigation
Skip navigation

Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Lafleur, T.; Boswell, R. W.; Booth, J. P.

Description

Through the use of particle-in-cell simulations, we demonstrate that the power deposition in capacitively coupled discharges (in argon) can be increased by replacing sinusoidal waveforms with Gaussian-shaped voltage pulses (with a repetition frequency of 13.56 MHz). By changing the Gaussian pulse width, electron heating can be directly controlled, allowing for an increased plasma density and ion flux for the same gas pressure and geometrical operating conditions. Analysis of the power...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
URI: http://hdl.handle.net/1885/28547
Source: Applied Physics Letters
DOI: 10.1063/1.4712128

Download

File Description SizeFormat Image
01_Lafleur_Enhanced_sheath_heating_in_2012.pdfPublished Version856.77 kBAdobe PDFThumbnail


Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.

Updated:  23 August 2018/ Responsible Officer:  University Librarian/ Page Contact:  Library Systems & Web Coordinator