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Introduction of atomic hydrogen into Si 3 N 4 /SiO 2 /Si stacks

Jin, Hao; Weber, Klaus; Li, Wei; Blakers, Andrew

Description

Atomic H generated by a plasma NH3 source at 400°C was demonstrated to passivate dehydroge-nated Si3N4/SiO2/Si stacks effectively by bonding with defects in the Si3N4 film and at the Si-SiO2 interface. A subsequent anneal in N2 after atomic H reintroduct

CollectionsANU Research Publications
Date published: 2006
Type: Journal article
URI: http://hdl.handle.net/1885/27439
Source: Rare Metals
DOI: 10.1016/S1001-0521(07)60063-1

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