Crosstalk reduction for multi-channel optical phase metrology
Digitally enhanced heterodyne interferometry (DEHI) combines the sub-wavelength displacement measurements of conventional laser interferometry with the multiplexing capabilities of spread-spectrum modulation techniques to discriminate between multiple electric fields at a single photodetector. Technologies that benefit from DEHI include optical phased arrays, which require the simultaneous phase measurement of a large number of electric fields. A consequence of measuring the phase of multiple...[Show more]
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