The Impact of Thermal- and Photo-annealing of Chalcogenide Films for Optical Waveguides
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Madden, Steve; Wang, Rongping; Luther-Davies, Barry; Choi, Duk-Yong
Description
We applied thermal- and band-edge light annealing on an as-deposited As2S3 film to mitigate its phase separation and, thus to improve the propagation losses of fabricated optical waveguides. Studies of the film micro structure revealed a difference between atomic bonds and linked phases among the as-deposited, thermally-annealed, and optically-annealed films. We fabricated rib-type waveguides with 4 micron width from 0.85 μm thick films, and measured the insertion losses. Around 0.4 and 0.2...[Show more]
Collections | ANU Research Publications |
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Date published: | 2011 |
Type: | Conference paper |
URI: | http://hdl.handle.net/1885/27172 |
Source: | Proceedings of the International Quantum Electronics Conference and Conference on Lasers and Electro-Optics Pacific Rim 2011 |
DOI: | 10.1109/IQEC-CLEO.2011.6193728 |
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01_Choi_The_Impact_of_Thermal-_and_2011.pdf | 159.86 kB | Adobe PDF | ||
02_Choi_The_Impact_of_Thermal-_and_2011.pdf | 545.86 kB | Adobe PDF |
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