Chen, Ying; Chen, Hua; Yu, Jun; Williams, James S.; Craig, Vince
Focused ion beam FIB milling system has been used to create nanosized patterns as the template
for patterned growth of carbon nanotubes on Si substrate surface without predeposition of metal
catalysts. Carbon nanotubes only nucleate and grow on the template under controlled pyrolysis of
iron phthalocyanine at 1000 °C. The size, growth direction, and density of the patterned nanotubes
can be controlled under different growth conditions and template sizes. Atomic force microscopy
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