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Spectral measurements of inductively coupled and m =+1,-1 helicon discharge modes of the constructed plasma source

Khoshhal, M.; Habibi, M.; Boswell, Roderick


In the present context, the industrial type of Amirkabir helicon plasma source has been introduced that was designed and constructed at the Helicon Plasma Laboratory of Amirkabir University of Technology with the aim of using it in material processing applications. Helicon plasma in two m = +1 and m = −1 modes of operation was studied, and also its application was compared with the inductively coupled plasma (ICP) mode in this experimental work. This study was performed by employing two...[Show more]

CollectionsANU Research Publications
Date published: 2020
Type: Journal article
Source: AIP Advances
DOI: 10.1063/1.5140346
Access Rights: Open Access


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