Instability in a low-pressure inductively coupled oxygen plasma
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Corr, Cormac; Steen, PG; Graham, W G
Description
A reproducible instability, which appears similar to those reported previously, has been observed and studied in a low-pressure 13.56 MHz inductively coupled gaseous electronics conference rf cell operating in oxygen. The instability has been observed in
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2003 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/25885 |
| Source: | Plasma Sources Science and Technology |
| DOI: | 10.1088/0963-0252/12/2/318 |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Corr_Instability_in_a_low-pressure_2003.pdf | 218.52 kB | Adobe PDF | Request a copy |
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