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Instability in a low-pressure inductively coupled oxygen plasma

Corr, Cormac; Steen, PG; Graham, W G


A reproducible instability, which appears similar to those reported previously, has been observed and studied in a low-pressure 13.56 MHz inductively coupled gaseous electronics conference rf cell operating in oxygen. The instability has been observed in

CollectionsANU Research Publications
Date published: 2003
Type: Journal article
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/12/2/318


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