A novel technique for plasma density measurement using surface-wave transmission spectra
A technique for the measurement of the absolute electron density in low-pressure plasmas using microwaves is described. It is based on observing the propagation of electromagnetic surface waves (SW) at a plasma-sheath boundary, guided by a dielectric cylinder immersed in the plasma. The transmission spectrum is measured between two antennas situated at either end of the dielectric cylinder and connected to a network analyser. Analytical theory based on the Trivelpiece-Gould work (Trivelpiece...[Show more]
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|Source:||Plasma Sources Science and Technology|
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