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Redefinition of the self-bias voltage in a dielectrically shielded thin sheath RF discharge

Ho, Teck Seng; Charles, Christine; Boswell, Rod

Description

In a geometrically asymmetric capacitively coupled discharge where the powered electrode is shielded from the plasma by a layer of dielectric material, the self-bias manifests as a nonuniform negative charging in the dielectric rather than on the blocking capacitor. In the thin sheath regime where the ion transit time across the powered sheath is on the order of or less than the Radiofrequency (RF) period, the plasma potential is observed to respond asymmetrically to extraneous impedances in...[Show more]

CollectionsANU Research Publications
Date published: 2018
Type: Journal article
URI: http://hdl.handle.net/1885/251971
Source: Journal of Applied Physics
DOI: 10.1063/1.5023076
Access Rights: Open Access

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