Effective impurity gettering by phosphorus- and boron-diffused polysilicon passivating contacts for silicon solar cells
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Liu, AnYao; Yan, Di; Phang, Sieu Pheng; Cuevas, Andres; Macdonald, Daniel
Description
This paper presents direct experimental evidence for the strong impurity gettering effects associated with the formation of both phosphorus and boron doped polysilicon/oxide passivating contacts for silicon solar cells, doped via thermal diffusion from POCl3 or BBr3 sources. Ion-implanted iron is used as a marker to quantify the gettering effectiveness via carrier lifetime measurements. The process conditions for fabricating optimum polysilicon passivating contacts are found to remove more than...[Show more]
Collections | ANU Research Publications |
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Date published: | 2018 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/251227 |
Source: | Solar Energy Materials and Solar Cells |
DOI: | 10.1016/j.solmat.2017.11.004 |
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01_Liu_Effective_impurity_gettering_2018.pdf | 678.84 kB | Adobe PDF | Request a copy |
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