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Effective impurity gettering by phosphorus- and boron-diffused polysilicon passivating contacts for silicon solar cells

Liu, AnYao; Yan, Di; Phang, Sieu Pheng; Cuevas, Andres; Macdonald, Daniel

Description

This paper presents direct experimental evidence for the strong impurity gettering effects associated with the formation of both phosphorus and boron doped polysilicon/oxide passivating contacts for silicon solar cells, doped via thermal diffusion from POCl3 or BBr3 sources. Ion-implanted iron is used as a marker to quantify the gettering effectiveness via carrier lifetime measurements. The process conditions for fabricating optimum polysilicon passivating contacts are found to remove more than...[Show more]

CollectionsANU Research Publications
Date published: 2018
Type: Journal article
URI: http://hdl.handle.net/1885/251227
Source: Solar Energy Materials and Solar Cells
DOI: 10.1016/j.solmat.2017.11.004

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