Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp
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Han, Ting; Madden, Steve; Bulla, Douglas; Debbarma, Sukhanta; Luther-Davies, Barry
Description
In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2011 |
| Type: | Conference paper |
| URI: | http://hdl.handle.net/1885/24973 |
| Source: | European Conference on Lasers and Electro-Optics (CLEO/Europe) 2011 |
| DOI: | 10.1109/CLEOE.2011.5943254 |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Han_Direct_molding_Chalcogenide_2011.pdf | 265.51 kB | Adobe PDF | Request a copy |
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