Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp
In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.
|Collections||ANU Research Publications|
|Source:||European Conference on Lasers and Electro-Optics (CLEO/Europe) 2011|
|01_Han_Direct_molding_Chalcogenide_2011.pdf||265.51 kB||Adobe PDF||Request a copy|
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