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Direct molding Chalcogenide glass waveguides using thermal nanoimprint lithography with a soft PDMS stamp

Han, Ting; Madden, Steve; Bulla, Douglas; Debbarma, Sukhanta; Luther-Davies, Barry


In this paper, we report the first thermal nano-imprint fabrication of low loss As2S3 Chalocgenide glass waveguides. As2S3 rib waveguides 2-4m wide and 1m high with losses below 0.5dB/cm at 1550nm were thermally embossed by a soft stamp made from Polydimethylsiloxane (PDMS) on a 100mm wafer scale.

CollectionsANU Research Publications
Date published: 2011
Type: Conference paper
Source: European Conference on Lasers and Electro-Optics (CLEO/Europe) 2011
DOI: 10.1109/CLEOE.2011.5943254


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