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Electron inelastic mean free path in solids as determined by electron Rutherford back-scattering

Went, Michael; Vos, Maarten; Elliman, Robert

Description

Energetic electrons scattering elastically over large angles from atoms lose energy depending on the mass of the scattering atom. If the energy of the incident electron is large enough, 10's of keV, this energy loss can be measured with high resolution electron spectrometers, allowing the separation of heavy and light elements. This technique is in many ways analogous to Rutherford back-scattering (RBS), with electrons employed as the scattering particle rather than ions. We refer to these...[Show more]

dc.contributor.authorWent, Michael
dc.contributor.authorVos, Maarten
dc.contributor.authorElliman, Robert
dc.date.accessioned2015-12-07T22:43:03Z
dc.identifier.issn0368-2048
dc.identifier.urihttp://hdl.handle.net/1885/24834
dc.description.abstractEnergetic electrons scattering elastically over large angles from atoms lose energy depending on the mass of the scattering atom. If the energy of the incident electron is large enough, 10's of keV, this energy loss can be measured with high resolution electron spectrometers, allowing the separation of heavy and light elements. This technique is in many ways analogous to Rutherford back-scattering (RBS), with electrons employed as the scattering particle rather than ions. We refer to these measurements as electron Rutherford back-scattering (ERBS). We present ERBS data for a simple two-layer system (gold on carbon). It is shown that this method can be used to determine the inelastic mean free path of electrons in carbon. We obtain a value of 350 ± 50 Å for 40 keV electrons in amorphous carbon. A comparison of the ERBS results is made with traditional RBS results from the same film. A consistent interpretation of both measurements using calculated differential elastic cross sections was not obtained.
dc.publisherElsevier
dc.sourceJournal of Electron Spectroscopy and Related Phenomena
dc.subjectKeywords: Amorphous carbon; Electron spectroscopy; Gold compounds; Rutherford backscattering spectroscopy; Thin films; Incident electrons; Inelastic mean free path; Resolution electron spectrometers; Thin film analysis; Elastic scattering Elastic scattering; Inelastic mean free path; Thin film analysis
dc.titleElectron inelastic mean free path in solids as determined by electron Rutherford back-scattering
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume156-158
dc.date.issued2007
local.identifier.absfor020406 - Surfaces and Structural Properties of Condensed Matter
local.identifier.ariespublicationu8709800xPUB34
local.type.statusPublished Version
local.contributor.affiliationWent, Michael, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationVos, Maarten, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationElliman, Robert, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage387
local.bibliographicCitation.lastpage392
local.identifier.doi10.1016/j.elspec.2006.11.041
dc.date.updated2015-12-07T11:14:44Z
local.identifier.scopusID2-s2.0-34247101463
CollectionsANU Research Publications

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