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Electron inelastic mean free path in solids as determined by electron Rutherford back-scattering

Went, Michael; Vos, Maarten; Elliman, Robert


Energetic electrons scattering elastically over large angles from atoms lose energy depending on the mass of the scattering atom. If the energy of the incident electron is large enough, 10's of keV, this energy loss can be measured with high resolution electron spectrometers, allowing the separation of heavy and light elements. This technique is in many ways analogous to Rutherford back-scattering (RBS), with electrons employed as the scattering particle rather than ions. We refer to these...[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
Source: Journal of Electron Spectroscopy and Related Phenomena
DOI: 10.1016/j.elspec.2006.11.041


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