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Quantification of Sheet Resistance in Boron-Diffused Silicon Using Micro-Photoluminescence Spectroscopy at Room Temperature

Nguyen, Hieu; Johnston, Steve; Paduthol, Appu; Harvey, Steven P; Phang, Sieu Pheng; Samundsett, Christian; Sun, Chang; Yan, Di; Trupke, Thorsten; Al-Jassim, Mowafak M; Macdonald, Daniel

Description

A micro‐photoluminescence‐based technique is presented, to quantify and map sheet resistances of boron‐diffused layers in silicon solar cell precursors with micron‐scale spatial resolution at room temperature. The technique utilizes bandgap narrowing effects in the heavily‐doped layers, yielding a broader photoluminescence spectrum at the long‐wavelength side compared to the spectrum emitted from lightly doped silicon. By choosing an appropriate spectral range as a metric to assess the doping...[Show more]

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
URI: http://hdl.handle.net/1885/247422
Source: RRL Solar
DOI: 10.1002/solr.201700088

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