Preferential Amorphization and Defect Annihilation at Nanocavities in Silicon Durion Ion Irradiation
Si containing a band of nanocavities has been irradiated with Si+ ions at elevated temperatures to study interactions of irradiation-induced defects with open volume defects. For irradiation at 100°C, nanocavities are shown to be preferential nucleation
|Collections||ANU Research Publications|
|Source:||Applied Physics Letters|
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