Preferential Amorphization and Defect Annihilation at Nanocavities in Silicon Durion Ion Irradiation
Williams, James; Zhu, Xiaohua; Ridgway, Mark C; Conway, Martin; Williams, Ben C; Fortuna, Frank Nicholas; Ruault, M-O; Bernas, Harry
Description
Si containing a band of nanocavities has been irradiated with Si+ ions at elevated temperatures to study interactions of irradiation-induced defects with open volume defects. For irradiation at 100°C, nanocavities are shown to be preferential nucleation
| Collections | ANU Research Publications |
|---|---|
| Date published: | 2000 |
| Type: | Journal article |
| URI: | http://hdl.handle.net/1885/24694 |
| Source: | Applied Physics Letters |
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| File | Description | Size | Format | Image |
|---|---|---|---|---|
| 01_Williams_Preferential_Amorphization_and_2000.pdf | 687.65 kB | Adobe PDF | Request a copy |
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