Plasma Ionization in Low-Pressure Radio-Frequency Discharges - Part I: Optical Measurements
O'Connell, D; Gans, T; Meige, A; Awakowicz, Peter; Boswell, Roderick
The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons...[Show more]
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|Source:||IEEE Transactions on Plasma Science|
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