Plasma Ionization in Low-Pressure Radio-Frequency Discharges - Part I: Optical Measurements
The electron dynamics in the low-pressure operation regime (< 5 Pa) of a neon capacitively coupled plasma is investigated using phase-resolved optical emission spectroscopy. Plasma ionization and sustainment mechanisms are governed by the expanding and contracting sheath and complex wave-particle interactions. Electrons are energized through the advancing and retreating electric field of the RF sheath. The associated interaction of energetic sheath electrons with thermal bulk plasma electrons...[Show more]
|Collections||ANU Research Publications|
|Source:||IEEE Transactions on Plasma Science|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.