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Ion Beam Induced Epitaxy Experiments in Silicon under Channeling and Random Alignments

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Williams, James; Young, I M; Conway, Martin

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This paper examines issues arising in ion beam induced epitaxial crystallisation (IBIEC) of both surface and buried amorphous silicon layers at 320°C under random and channeled alignment of MeV C+ beams. These issues include: random versus channeled ener

dc.contributor.authorWilliams, James
dc.contributor.authorYoung, I M
dc.contributor.authorConway, Martin
dc.date.accessioned2015-12-07T22:42:22Z
dc.identifier.issn0168-583X
dc.identifier.urihttp://hdl.handle.net/1885/24523
dc.description.abstractThis paper examines issues arising in ion beam induced epitaxial crystallisation (IBIEC) of both surface and buried amorphous silicon layers at 320°C under random and channeled alignment of MeV C+ beams. These issues include: random versus channeled ener
dc.publisherElsevier
dc.sourceNuclear Instruments and Methods in Physics Research: Section B
dc.subjectKeywords: Amorphous silicon; Carbon; Crystallization; Epitaxial growth; Helium; Rutherford backscattering spectroscopy; Channeling; Ion beam induced epitaxial crystallisation; Ion beams
dc.titleIon Beam Induced Epitaxy Experiments in Silicon under Channeling and Random Alignments
dc.typeJournal article
local.description.notesImported from ARIES
local.description.refereedYes
local.identifier.citationvolume161-163
dc.date.issued2000
local.identifier.absfor100507 - Optical Networks and Systems
local.identifier.ariespublicationMigratedxPub33
local.type.statusPublished Version
local.contributor.affiliationWilliams, James, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationYoung, I M, College of Physical and Mathematical Sciences, ANU
local.contributor.affiliationConway, Martin, College of Physical and Mathematical Sciences, ANU
local.description.embargo2037-12-31
local.bibliographicCitation.startpage505
local.bibliographicCitation.lastpage509
local.identifier.doi10.1016/S0168-583X(99)00904-0
dc.date.updated2015-12-07T11:07:29Z
local.identifier.scopusID2-s2.0-0033900733
CollectionsANU Research Publications

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