Plasma Ionization in Low-Pressure Radio-Frequency Discharges-Part II: Particle-in-Cell Simulation
Plasma ionization in the low-pressure operation regime (< 5 Pa) of RF capacitively coupled plasmas (CCPs) is governed by a complex interplay of various mechanisms, such as field reversal, sheath expansion, and wave-particle interactions. In a previous paper, it was shown that experimental observations in a hydrogen CCP operated at 13.56 MHz are qualitatively well described in a 1-D symmetrical particle-in-cell (PIC) simulation. In this paper, a spherical asymmetrical PIC simulation that is...[Show more]
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|Source:||IEEE Transactions on Plasma Science|
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