EXAFS study of the amorphous phase of InP after swift heavy ion irradiation
Structural parameters of InP amorphised by electronic energy deposition were determined using extended X-ray absorption fine structure spectrometry. Samples were prepared with 180 MeV Au13+ irradiation and a combination of semiconductor processing techniques and chemical etching. At the In K-edge of the amorphous material, only the first shell scattering peak is observed demonstrating the structural disorder introduced by the swift heavy ion irradiation. Furthermore, the presence of chemical...[Show more]
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|Source:||Nuclear Instruments and Methods in Physics Research: Section B|
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