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SU-8 protective layer in photo-resist patterning on As2S3 film

Choi, Duk-Yong; Madden, Steve; Bulla, Douglas; Rode, Andrei V; Wang, Rongping; Luther-Davies, Barry


Amorphous chalcogenide thin films, especially arsenic tri-sulphide (As2S3) are emerging as an excellent platform for integrated non-linear optic devices due to their high non-linearity as well as low linear and nonlinear optical loss. Fabricating planar As2S3 waveguides, however, is not straightforward because As2S3 is dissolved in alkalis such as photo-resist developer. In this study we present the application of thin SU-8 film as a protective layer to prevent the attack of the developer on...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: Physica Status Solidi C
DOI: 10.1002/pssc.201000741


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