SU-8 protective layer in photo-resist patterning on As2S3 film
Amorphous chalcogenide thin films, especially arsenic tri-sulphide (As2S3) are emerging as an excellent platform for integrated non-linear optic devices due to their high non-linearity as well as low linear and nonlinear optical loss. Fabricating planar As2S3 waveguides, however, is not straightforward because As2S3 is dissolved in alkalis such as photo-resist developer. In this study we present the application of thin SU-8 film as a protective layer to prevent the attack of the developer on...[Show more]
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|Source:||Physica Status Solidi C|
|01_Choi_SU-8_protective_layer_in_2011.pdf||288.62 kB||Adobe PDF||Request a copy|
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