Choi, Duk-Yong; Madden, Steve; Bulla, Douglas; Rode, Andrei V; Wang, Rongping; Luther-Davies, Barry
Amorphous chalcogenide thin films, especially arsenic tri-sulphide (As2S3) are emerging as an excellent platform for integrated non-linear optic devices due to their high non-linearity as well as low linear and nonlinear optical loss. Fabricating planar As2S3 waveguides, however, is not straightforward because As2S3 is dissolved in alkalis such as photo-resist developer. In this study we present the application of thin SU-8 film as a protective layer to prevent the attack of the developer on...[Show more]
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.