Takahashi, Kazunori; Charles, Christine; Boswell, Roderick; Lieberman, M; Hatakeyama, R
Electron temperature is characterized in a low-pressure argon plasma diffusing from a magnetically expanding radiofrequency plasma containing a current-free double layer (DL) over the argon gas pressure of 0.3-3 mTorr. The measured electron energy probability function (EEPF) is Maxwellian at the downstream side of the DL, while the upstream EEPF shows a depleted tail corresponding to free electrons, which can overcome the potential drop of the DL and diffuse into the downstream side. The free...[Show more]
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