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Tailored Nanostructures for Microgassensors by Flame Spray Pyrolysis

Tricoli, Antonio; Pratsinis, S.E

Description

Integration of nanoparticle synthesis and deposition in micro-machining processes is a mandatory step toward development of nanodevices. Indeed, large scale production of tailored particles is achievable in aerosol reactors. Direct deposition from the aerosol leads to formation of nanostructured layers avoiding the cumbersome steps of wet-methods. Nevertheless, improvement of nanoparticle cohesion and adhesion by isothermal sintering results in deterioration of the device performance due to...[Show more]

dc.contributor.authorTricoli, Antonio
dc.contributor.authorPratsinis, S.E
dc.date.accessioned2015-12-07T22:40:57Z
dc.identifier.issn1746-9392
dc.identifier.urihttp://hdl.handle.net/1885/24091
dc.description.abstractIntegration of nanoparticle synthesis and deposition in micro-machining processes is a mandatory step toward development of nanodevices. Indeed, large scale production of tailored particles is achievable in aerosol reactors. Direct deposition from the aerosol leads to formation of nanostructured layers avoiding the cumbersome steps of wet-methods. Nevertheless, improvement of nanoparticle cohesion and adhesion by isothermal sintering results in deterioration of the device performance due to crystal and grain growth. Furthermore, sufficient stabilisation is not always possible at substrate compatible temperatures. Here, we describe the synthesis and deposition of SnO2, TiO2 and SnO2-SiO2 nanostructured layers that can be utilised for micro-machined gas sensors.
dc.publisherInderscience Publishers
dc.sourceInternational Journal of Nanomanufacturing
dc.subjectKeywords: Direct deposition; In-situ annealing; Microgassensors; Nano-manufacturing; SiO; SnO; TiOv; Adhesion; Atmospheric aerosols; Ethanol; Flame spraying; Machining; Nanoparticles; Protective coatings; Silicon compounds; Sintering; Spray pyrolysis; Grain growth Direct deposition; Ethanol; Film; In-situ annealing; Microgassensors; Nanomanufacturing; SiO2; SnO2; Stability; TiOv 2
dc.titleTailored Nanostructures for Microgassensors by Flame Spray Pyrolysis
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume6
dc.date.issued2010
local.identifier.absfor091299 - Materials Engineering not elsewhere classified
local.identifier.ariespublicationu4628727xPUB30
local.type.statusPublished Version
local.contributor.affiliationTricoli, Antonio, College of Engineering and Computer Science, ANU
local.contributor.affiliationPratsinis, S.E, Swiss Federal Institute of Technology Zurich (ETH Zurich)
local.description.embargo2037-12-31
local.bibliographicCitation.issue1
local.bibliographicCitation.startpage125
local.bibliographicCitation.lastpage136
local.identifier.doi10.1504/IJNM.2010.034778
local.identifier.absseo970109 - Expanding Knowledge in Engineering
dc.date.updated2016-02-24T11:14:54Z
local.identifier.scopusID2-s2.0-77956017402
CollectionsANU Research Publications

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