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Arrays of Au nanoparticles on Si formed by nanoindentation and a simple thermal/wipe-off technique

Shalav, Avi; Wong, Sherman; Ruffell, Simon; Elliman, Robert


This study demonstrates a novel technique for the fabrication of ordered arrays of Au rich nanoparticles on a Si substrate. Si substrates, with their native oxides intact, are pre-patterned using nanoindentation to create regions on the surface that readily alloy at higher temperatures with a thin thermally evaporated Au layer. Larger Au rich particles are observed to form at the indentation sites after high temperature annealing in an inert atmosphere. After mechanical wiping, the Au rich...[Show more]

CollectionsANU Research Publications
Date published: 2012
Type: Journal article
Source: Materials Science Forum
DOI: 10.4028/


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