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Improvement in the Imaging Performance of Atomic Force Microscopy: A Survey

Rana, Md. Sohel; Pota, Hemanshu R.; Petersen, Ian


Nanotechnology is the branch of science which deals with the manipulation of matters at an extremely high resolution down to the atomic level. In recent years, atomic force microscopy (AFM) has proven to be extremely versatile as an investigative tool in this field. The imaging performance of AFMs is hindered by: 1) the complex behavior of piezo materials, such as vibrations due to the lightly damped low-frequency resonant modes, inherent hysteresis, and creep nonlinearities; 2) the...[Show more]

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
Source: IEEE Transactions on Automation Science and Engineering
DOI: 10.1109/TASE.2016.2538319
Access Rights: Open Access


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