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Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

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Yan, Ting-Yang; Shen, Xiang; Wang, Rongping; Wang, Guoxiang; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua

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Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot...[Show more]

dc.contributor.authorYan, Ting-Yang
dc.contributor.authorShen, Xiang
dc.contributor.authorWang, Rongping
dc.contributor.authorWang, Guoxiang
dc.contributor.authorDai, Shixun
dc.contributor.authorXu, Tiefeng
dc.contributor.authorNie, Qiuhua
dc.date.accessioned2021-07-02T03:39:41Z
dc.identifier.issn1674-1056
dc.identifier.urihttp://hdl.handle.net/1885/238523
dc.description.abstractChalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions
dc.format.mimetypeapplication/pdf
dc.language.isoen_AU
dc.publisherChinese Physical Society
dc.rights© 2017 Chinese Physical Society and IOP Publishing Ltd
dc.sourceChinese Physics B
dc.subjectchalcogenide glasses
dc.subjecthot embossing
dc.subjectrib waveguides
dc.subjectMIR sensing
dc.titleHot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing
dc.typeJournal article
local.description.notesImported from ARIES
local.identifier.citationvolume26
dc.date.issued2017
local.identifier.absfor090606 - Photonics and Electro-Optical Engineering (excl. Communications)
local.identifier.ariespublicationa383154xPUB5249
local.publisher.urlhttp://iopscience.iop.org/1674-1056
local.type.statusPublished Version
local.contributor.affiliationYan, Ting-Yang, Ningbo University
local.contributor.affiliationShen, Xiang, Ningbo University
local.contributor.affiliationWang, Rongping, College of Science, ANU
local.contributor.affiliationWang, Guoxiang, Ningbo University
local.contributor.affiliationDai, Shixun, Ningbo University
local.contributor.affiliationXu, Tiefeng, Ningbo University
local.contributor.affiliationNie, Qiuhua, Ningbo University
local.description.embargo2099-12-31
local.bibliographicCitation.issue2
local.bibliographicCitation.startpage024213-1
local.bibliographicCitation.lastpage024213-7
local.identifier.doi10.1088/1674-1056/26/2/024213
dc.date.updated2020-11-23T10:37:51Z
local.identifier.scopusID2-s2.0-85013249218
local.identifier.thomsonID000402239000003
CollectionsANU Research Publications

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