Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing
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Yan, Ting-Yang; Shen, Xiang; Wang, Rongping; Wang, Guoxiang; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua
Description
Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot...[Show more]
dc.contributor.author | Yan, Ting-Yang | |
---|---|---|
dc.contributor.author | Shen, Xiang | |
dc.contributor.author | Wang, Rongping | |
dc.contributor.author | Wang, Guoxiang | |
dc.contributor.author | Dai, Shixun | |
dc.contributor.author | Xu, Tiefeng | |
dc.contributor.author | Nie, Qiuhua | |
dc.date.accessioned | 2021-07-02T03:39:41Z | |
dc.identifier.issn | 1674-1056 | |
dc.identifier.uri | http://hdl.handle.net/1885/238523 | |
dc.description.abstract | Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot embossing method, and discuss the problems remaining to be solved and the possible solutions | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en_AU | |
dc.publisher | Chinese Physical Society | |
dc.rights | © 2017 Chinese Physical Society and IOP Publishing Ltd | |
dc.source | Chinese Physics B | |
dc.subject | chalcogenide glasses | |
dc.subject | hot embossing | |
dc.subject | rib waveguides | |
dc.subject | MIR sensing | |
dc.title | Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.identifier.citationvolume | 26 | |
dc.date.issued | 2017 | |
local.identifier.absfor | 090606 - Photonics and Electro-Optical Engineering (excl. Communications) | |
local.identifier.ariespublication | a383154xPUB5249 | |
local.publisher.url | http://iopscience.iop.org/1674-1056 | |
local.type.status | Published Version | |
local.contributor.affiliation | Yan, Ting-Yang, Ningbo University | |
local.contributor.affiliation | Shen, Xiang, Ningbo University | |
local.contributor.affiliation | Wang, Rongping, College of Science, ANU | |
local.contributor.affiliation | Wang, Guoxiang, Ningbo University | |
local.contributor.affiliation | Dai, Shixun, Ningbo University | |
local.contributor.affiliation | Xu, Tiefeng, Ningbo University | |
local.contributor.affiliation | Nie, Qiuhua, Ningbo University | |
local.description.embargo | 2099-12-31 | |
local.bibliographicCitation.issue | 2 | |
local.bibliographicCitation.startpage | 024213-1 | |
local.bibliographicCitation.lastpage | 024213-7 | |
local.identifier.doi | 10.1088/1674-1056/26/2/024213 | |
dc.date.updated | 2020-11-23T10:37:51Z | |
local.identifier.scopusID | 2-s2.0-85013249218 | |
local.identifier.thomsonID | 000402239000003 | |
Collections | ANU Research Publications |
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