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Hot-embossing fabrication of chalcogenide glasses rib waveguide for mid-infrared molecular sensing

Yan, Ting-Yang; Shen, Xiang; Wang, Rongping; Wang, Guoxiang; Dai, Shixun; Xu, Tiefeng; Nie, Qiuhua

Description

Chalcogenide glasses have shown promise in fabricating mid infrared (MIR) photonic sensing devices due to their excellent optical properties in MIR. In addition, the glass transition temperature of chalcogenide glasses are generally low, making them ideal to create the high-throughput patterns of micro-scale structures based on hot embossing that is alternative to the standard lithographic technology. In this paper, we outline the research progress in the chalcogenide waveguide based on the hot...[Show more]

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
URI: http://hdl.handle.net/1885/238523
Source: Chinese Physics B
DOI: 10.1088/1674-1056/26/2/024213

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