Stress and Stress Relief in Dielectric Thin Films - The Role of Hydrogen
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Elliman, Robert; Dall (previously Weijers), Tessica; Spooner, M G; Kim, Tae-Hyun; Wilkinson, Andrew
Description
Novel crack propagation modes are reported in amorphous silicon-rich oxide (SiOx) films deposited onto (1 0 0) silicon substrates and subjected to thermal annealing. These include the formation of straight cracks aligned with 〈0 0 1〉 directions in the
Collections | ANU Research Publications |
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Date published: | 2006 |
Type: | Journal article |
URI: | http://hdl.handle.net/1885/23851 |
Source: | Nuclear Instruments and Methods in Physics Research: Section B |
DOI: | 10.1016/j.nimb.2006.04.018 |
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01_Elliman_Stress_and_Stress_Relief_in_2006.pdf | 153.25 kB | Adobe PDF | Request a copy |
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