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PECVD Silicon Nitride Passivation on Boron Emitter: The Analysis of Electrostatic Charge on the Interface Properties

Nursam, Natalita; Ren, Yongling; Weber, Klaus

Description

The dependence of surface recombination of boron diffused and undiffused silicon surfaces passivated with a-Si N x:H on the net charge density is investigated in detail. The films are deposited by plasma-enhanced chemical vapour deposition using a 2.45GHz microwave remote plasma system. The surface charge density on the samples is varied by depositing charge using a corona discharge chamber. Excess carrier lifetime, capacitance-voltage, and Kelvin probe measurements are combined to determine...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
URI: http://hdl.handle.net/1885/23745
Source: Advances in OptoElectronics
DOI: 10.1155/2010/487406

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