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Transport and Deposition of Plasma-Sputtered Platinum Atoms: Comparison Between Experiments and Simulation

Caillard, A.; Charles, Christine; Boswell, Roderick; Brault, Pascal


The deposition of platinum atoms by argon plasma sputtering has been simulated by using a 3-D Monte Carlo simulation called Sputtered Particles Transport in Gas, which provides spatial and energy distributions of the Pt atoms impinging on the substrate and on the chamber walls. The Yamamura formula provides the Pt sputtering yield from argon ions, whereas the initial energy distribution of sputtered atoms is given by the Thompson distribution. The Pt flux on the chamber walls and on the...[Show more]

CollectionsANU Research Publications
Date published: 2008
Type: Journal article
Source: IEEE Transactions on Plasma Science
DOI: 10.1109/TPS.2008.924421


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