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RIE-induced carrier lifetime degradation

Zin, Ngwe Soe; Weber, Klaus; Blakers, Andrew


Reactive Ion Etching (RIE) is used in the fabrication of some types of solar cells to achieve a highly directional etch. However, cells fabricated using RIE have lower than expected efficiency, possibly caused by increased carrier recombination. Characterisation of the carrier lifetime in solar cells was conducted using the quasi steady state photoconductance (QSSPC) measurement technique. Substantial effective lifetime degradation was observed for silicon samples processed by RIE. Lifetime...[Show more]

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
Source: Progress in Photovoltaics: Research and Applications
DOI: 10.1002/pip.935


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