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A Survey of Methods Used to Control Piezoelectric Tube Scanners in High-Speed AFM Imaging

Rana, Md. Sohel; Pota, Hemanshu R.; Petersen, Ian


In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. For control engineers, the PTS is particularly interesting since its ability to enable the AFM to undertake 3D imaging is entirely dependent upon the use of a feedback loop. However, it suffers from various...[Show more]

CollectionsANU Research Publications
Date published: 2018-01-17
Type: Journal article
Source: Asian Journal of Control
DOI: 10.1002/asjc.1728


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