A Survey of Methods Used to Control Piezoelectric Tube Scanners in High-Speed AFM Imaging
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Rana, Md. Sohel; Pota, Hemanshu R.; Petersen, Ian
Description
In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. For control engineers, the PTS is particularly interesting since its ability to enable the AFM to undertake 3D imaging is entirely dependent upon the use of a feedback loop. However, it suffers from various...[Show more]
dc.contributor.author | Rana, Md. Sohel | |
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dc.contributor.author | Pota, Hemanshu R. | |
dc.contributor.author | Petersen, Ian | |
dc.date.accessioned | 2021-05-11T23:37:20Z | |
dc.identifier.issn | 1561-8625 | |
dc.identifier.uri | http://hdl.handle.net/1885/232643 | |
dc.description.abstract | In most nanotechnology applications, speed and precision are important requirements for obtaining good topographical maps of material surfaces using atomic force microscopes (AFMs), many of which use piezoelectric tube scanners (PTSs) for scanning and positioning at nanometric resolutions. For control engineers, the PTS is particularly interesting since its ability to enable the AFM to undertake 3D imaging is entirely dependent upon the use of a feedback loop. However, it suffers from various intrinsic problems that degrade its positioning performance, such as: (i) lightly damped low‐frequency resonant modes due to its mechanical structure; (ii) nonlinear behavior due to hysteresis and creep; (iii) the cross‐coupling effect between its axes (in 3D positioning systems such as AFMs); and (iv) effect of thermal drift. This article presents a survey of the literature on the PTS, an overview of a few existing innovative solutions for its nanopositioning and future research directions. This article will help the reader to walk around the present development of the PTS aimed at meeting the requirements for high‐speed AFM imaging. | |
dc.description.sponsorship | This work was supported by the Australian Research Council (ARC) under the Grant DP160101121. | |
dc.format.mimetype | application/pdf | |
dc.language.iso | en_AU | |
dc.publisher | Blackwell Publishing Ltd | |
dc.rights | © 2018 Chinese Automatic Control Society and John Wiley & Sons Australia, Ltd | |
dc.source | Asian Journal of Control | |
dc.subject | Nanotechnology | |
dc.subject | atomic force microscope | |
dc.subject | piezoelectric tube scanner | |
dc.subject | limiting factors | |
dc.title | A Survey of Methods Used to Control Piezoelectric Tube Scanners in High-Speed AFM Imaging | |
dc.type | Journal article | |
local.description.notes | Imported from ARIES | |
local.identifier.citationvolume | 20 | |
dcterms.dateAccepted | 2017-04-18 | |
dc.date.issued | 2018-01-17 | |
local.identifier.absfor | 100704 - Nanoelectromechanical Systems | |
local.identifier.ariespublication | a383154xPUB10276 | |
local.publisher.url | https://onlinelibrary.wiley.com/ | |
local.type.status | Published Version | |
local.contributor.affiliation | Rana, Md. Sohel, Rajshahi University of Engineering and Technology | |
local.contributor.affiliation | Pota, Hemanshu R., University of New South Wales | |
local.contributor.affiliation | Petersen, Ian, College of Engineering and Computer Science, ANU | |
local.description.embargo | 2099-12-31 | |
dc.relation | http://purl.org/au-research/grants/arc/DP160101121 | |
local.bibliographicCitation.issue | 4 | |
local.bibliographicCitation.startpage | 1379 | |
local.bibliographicCitation.lastpage | 1399 | |
local.identifier.doi | 10.1002/asjc.1728 | |
dc.date.updated | 2020-11-23T11:31:01Z | |
local.identifier.scopusID | 2-s2.0-85040715996 | |
Collections | ANU Research Publications |
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