A Novel Control Approach for High-Precision Positioning of a Piezoelectric Tube Scanner
An optimal controller for high-precision spiral positioning of a piezoelectric tube scanner used in an atomic force microscope (AFM) is proposed in this paper. In the proposed control scheme, a second-order vibration compensator is incorporated with the piezoelectric tube scanner (PTS) to suppress the vibration of the PTS at the resonant frequency. An internal model of a reference sinusoidal signal is included with the augmented plant model and an integrator is introduced with a linear...[Show more]
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|Source:||IEEE Transactions on Automation Science and Engineering|
|01_Habibullah_A_Novel_Control_Approach_for_2017.pdf||3.3 MB||Adobe PDF||Request a copy|
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