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A Novel Control Approach for High-Precision Positioning of a Piezoelectric Tube Scanner

Habibullah, H; Pota, Hemanshu R.; Petersen, Ian


An optimal controller for high-precision spiral positioning of a piezoelectric tube scanner used in an atomic force microscope (AFM) is proposed in this paper. In the proposed control scheme, a second-order vibration compensator is incorporated with the piezoelectric tube scanner (PTS) to suppress the vibration of the PTS at the resonant frequency. An internal model of a reference sinusoidal signal is included with the augmented plant model and an integrator is introduced with a linear...[Show more]

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
Source: IEEE Transactions on Automation Science and Engineering
DOI: 10.1109/TASE.2016.2526641


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