Janda, Petr; Valenta, Jan; Ostatnicky, T; Skopalova, E; Pelant, I; Elliman, Robert; Tomasiunas, R
Nanophotonic structures combining electronic confinement in nanocrystals with photon confinement in photonic structures are potential building blocks of future Si-based photonic devices. Here, we present a detailed optical investigation of active planar waveguides fabricated by Si+-ion implantation (400 keV, fluences from 3 to 6×1017 cm-2) of fused silica and thermally oxidized Si wafers. Si nanocrystals formed after annealing emit red-IR photoluminescence (PL) (under UV-blue excitation) and...[Show more]
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