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Electron interaction cross sections for a low-temperature 'plasma-like' gas mixture

Hargreaves, L.R.; Brunton, J R; Brunger, Michael J; Buckman, Stephen


Electron interaction cross sections for species found in low-temperature industrial plasma environments are a crucial component to allow for accurate modeling of those plasmas. However, such data are still rarely reported in the literature, due to the complexities of working with such highly reactive species in a laboratory. Here, absolute differential cross section measurements for a 'plasma-like' gas mixture, containing CF3I, CF3, I2, I and C2F6, are reported.

CollectionsANU Research Publications
Date published: 2010
Type: Journal article
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/19/6/065021


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