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Plasma Expansion From a Radio Frequency Microdischarge

Boswell, Roderick; Charles, Christine; Alexander, Peter; Dedrick, James; Takahashi, Kazunori


Plasma expansion of a capacitively coupled radio frequency (13.56 MHz) argon microdischarge into a larger glass tube is studied by acquisition and analysis of high-resolution digital images. The microdischarge operating conditions are a flow of about 1.5

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: IEEE Transactions on Plasma Science
DOI: 10.1109/TPS.2011.2143434


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