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Passivating and Physico-Chemical Properties of Silicon Nitride Deposited by Atmospheric Pressure Plasma for Photovoltaic Applications

CollectionsANU Research Publications
Date published: 2008
Type: Conference paper
URI: http://hdl.handle.net/1885/21963
Source: Proceedings of the European Photovoltaic Solar Energy Conference 2008
DOI: 10.4229/23rdEUPVSEC2008-2CV.5.2

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