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Neutral gas heating and ion transport in a constricted plasma flow

Ho, Teck Seng; Charles, Christine; Boswell, Roderick

Description

Ion-neutral charge exchange collisions are demonstrated to be the dominant heating mechanism in a weakly ionised ∼1  Torr Ar capacitively coupled radiofrequency plasma flowing through a cylinder. In this rarefied regime, thermal conduction is ineffective. The neutral gas temperature is significantly higher in the plasma bulk than in the plasma sheath due to different plasma parameters and ion transport behaviours in these regions. This study is achieved in a computational fluid dynamics and...[Show more]

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
URI: http://hdl.handle.net/1885/218256
Source: Physics of Plasmas
DOI: 10.1063/1.4996014

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