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Characterization of nanocrystalline nitrogen-containing titanium oxide obtained by N 2 /O 2 /Ar low-field helicon plasma sputtering

Sarra-Bournet, Christian; Haberl, Bianca; Charles, Christine; Boswell, Roderick

Description

TiO2 and nitrogen-containing TiO2 thin films were deposited on glass and silicon wafer substrates using a helicon-assisted reactive plasma sputtering process in a gas mixture of Ar/O2/N2. The growth mechanism, chemical composition and crystalline structure were probed by x-ray photoelectron spectroscopy, x-ray diffraction, Raman spectroscopy, scanning and transmission electron microscopy. The presence of nitrogen in the film induces the formation of some Ti3+ defects states, which introduces...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
URI: http://hdl.handle.net/1885/21316
Source: Journal of Physics D: Applied Physics
DOI: 10.1088/0022-3727/44/45/455202

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