Ling, Julia; Boswell, Roderick; Lafleur, Trevor; Charles, Christine
Microarcing is investigated with a helicon plasma reactor in an argon plasma. A Langmuir probe was used to measure the floating potential during arc events, and a stainless-steel probe arm on which microarcs occurred was used to measure the associated current flow. The frequency of microarc events (MAEs) was analyzed with varying radio-frequency powers and gas pressures and was found to strongly depend on the floating potential. The microarcs were shown to cause a drop in the bulk floating...[Show more]
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