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Microarcing in a Helicon Plasma Reactor

Ling, Julia; Boswell, Roderick; Lafleur, Trevor; Charles, Christine


Microarcing is investigated with a helicon plasma reactor in an argon plasma. A Langmuir probe was used to measure the floating potential during arc events, and a stainless-steel probe arm on which microarcs occurred was used to measure the associated current flow. The frequency of microarc events (MAEs) was analyzed with varying radio-frequency powers and gas pressures and was found to strongly depend on the floating potential. The microarcs were shown to cause a drop in the bulk floating...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: IEEE Transactions on Plasma Science
DOI: 10.1109/TPS.2011.2152863


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