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Rear Passivation and Point Contacts Formation by Laser Process through Stacks of a-Si:H(i) and a-Si:B/Sb for High Efficiency Silicon Solar Cell

Han, Young; Franklin, Evan; Zhang, Xinyu; Thomson, Andrew; Ernst, Marco

Description

In this work we investigate the effectiveness of deposited, boron- (for p-type) or antimony-doped (for n-type), amorphous silicon (a-Si:B/Sb) layers for producing multi-purpose films capable of providing both excellent surface passivation and effective localized doping via laser irradiation. We deposit, via sputtering or via a combination of PECVD and sputtering, layers of a-Si:B/Sb or stacks of a-Si:H(i) and a-Si:B/Sb on crystalline silicon substrates, and subsequently employ a KrF 248 nm...[Show more]

CollectionsANU Research Publications
Date published: 2016
Type: Conference paper
URI: http://hdl.handle.net/1885/205937
Source: Proceedings of the 32nd European Photovoltaic Solar Energy Conference
DOI: 10.4229/EUPVSEC20162016-2AV.1.17

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