Open Research: Porosity as a function of stoichiometry and implantation temperature in Ge/Si1-xGex alloys (vol 119, 094303, 2016)

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Porosity as a function of stoichiometry and implantation temperature in Ge/Si1-xGex alloys (vol 119, 094303, 2016)

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Alkhaldi, Huda; Kremer, Felipe; Bierschenk, Thomas; Hansen, J L; Nylandsted-Larsen, A; Williams, James; Ridgway, Mark C

Collections	ANU Research Publications
Date published:	2017
Type:	Journal article
URI:	http://hdl.handle.net/1885/205909
Source:	Journal of Applied Physics
DOI:	10.1063/1.4975029
Access Rights:	Open Access

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