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Porosity as a function of stoichiometry and implantation temperature in Ge/Si1-xGex alloys (vol 119, 094303, 2016)

CollectionsANU Research Publications
Date published: 2017
Type: Journal article
URI: http://hdl.handle.net/1885/205909
Source: Journal of Applied Physics
DOI: 10.1063/1.4975029
Access Rights: Open Access

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