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CMOS compatible fabrication of micro, nano convex silicon lens arrays by conformal chemical vapor deposition

Zuo, Haijie; Choi, Duk-Yong; Gai, Xin; Luther-Davies, Barry; Zhang, Baoping


We present a novel CMOS-compatible fabrication technique for convex micro-nano lens arrays (MNLAs) with high packing density on the wafer scale. By means of conformal chemical vapor deposition (CVD) of hydrogenated amorphous silicon (a-Si:H) following patterning of silicon pillars via electron beam lithography (EBL) and plasma etching, large areas of a close packed silicon lens array with the diameter from a few micrometers down to a few hundred nanometers was fabricated. The resulting...[Show more]

CollectionsANU Research Publications
Date published: 2017-02-06
Type: Journal article
Source: Optics Express
DOI: 10.1364/OE.25.003069
Access Rights: Open Access


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