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Detection and spatial mapping of conductive filaments in metal/oxide/metal cross-point devices using a thin photoresist layer

Nath, Shimul; Nandi, Sanjoy; Li, Shuai; Elliman, Robert


A simple means of detecting and spatially mapping volatile and nonvolatile conductive filaments in metal/oxide/metal cross-point devices is introduced, and its application demonstrated. The technique is based on thermal discolouration of a thin photoresist layer deposited on the top electrode (TE) of the cross-point device and relies on the increase in temperature produced by local Joule heating of an underlying conductive filament. Finite element modelling of the temperature distribution and...[Show more]

CollectionsANU Research Publications
Date published: 2019-02-12
Type: Journal article
Source: Applied Physics Letters
DOI: 10.1063/1.5084060
Access Rights: Open Access


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