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Ring defects in n-type Czochralski-grown silicon: A high spatial resolution study using Fourier-transform infrared spectroscopy, micro-photoluminescence, and micro-Raman

Basnet, Rabin; Sun, Chang; Wu, HuiTing; Nguyen, Hieu; Rougieux, Fiacre E.; Macdonald, Daniel


We investigated ring defects induced by a two-step anneal in n-type Czochralski-grown silicon wafers using a combination of high spatial resolution Fourier Transform Infrared Spectroscopy (FTIR), micro-photoluminescence (PL) mapping, and micro-Raman mapping. Through FTIR measurements, we show the inhomogeneous loss in interstitial oxygen with a positive correlation with the inverse lifetime. Using high-resolution micro-PL mapping, we are able to distinguish individual recombination-active...[Show more]

CollectionsANU Research Publications
Date published: 2018
Type: Journal article
Source: Journal of Applied Physics
DOI: 10.1063/1.5057724
Access Rights: Open Access


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