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Nanoscale density variations induced by high energy heavy ions in amorphous silicon nitride and silicon dioxide

Mota-Santiago, Pablo; Vazquez, H; Bierschenk, Thomas; Kremer, Felipe; Nadzri, Allina; Schauries, Daniel; Djurabekova, Flyura; Nordlund, Kai; Trautmann, Christina; Mudie, Stephen T.; Ridgway, Mark; Kluth, Patrick

Description

The cylindrical nanoscale density variations resulting from the interaction of 185 MeV and 2.2 GeV Au ions with 1.0 μm thick amorphous SiN x :H and SiO x :H layers are determined using small angle x-ray scattering measurements. The resulting density profiles resembles an under-dense core surrounded by an over-dense shell with a smooth transition between the two regions, consistent with molecular-dynamics simulations. For amorphous SiN x :H, the density variations show a radius of 4.2 nm with a...[Show more]

CollectionsANU Research Publications
Date published: 2018
Type: Journal article
URI: http://hdl.handle.net/1885/199568
Source: Nanotechnology
DOI: 10.1088/1361-6528/aaabdb

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