Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon
The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56 MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 νs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 νs) result in a filamentary discharge while long pulse...[Show more]
|Collections||ANU Research Publications|
|Source:||Plasma Sources Science and Technology|
|01_Balcon_Pulsed_RF_discharges,_glow_and_2007.pdf||419.53 kB||Adobe PDF||Request a copy|
Items in Open Research are protected by copyright, with all rights reserved, unless otherwise indicated.