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Pulsed RF discharges, glow and filamentary mode at atmospheric pressure in argon

Balcon, Nicolas; Aanesland, Ane; Boswell, Roderick

Description

The properties of a pulsed radio frequency capacitive discharge are investigated at atmospheric pressure in argon. The discharge can operate in two different modes: a homogeneous glow discharge or turn into filaments. By pulsing the 13.56 MHz generator both the filamentary and the glow modes can be selected depending on the pulse width and period. For a 5 νs pulse width (∼70 RF cycles in the pulse), short pulse periods (less than 100 νs) result in a filamentary discharge while long pulse...[Show more]

CollectionsANU Research Publications
Date published: 2007
Type: Journal article
URI: http://hdl.handle.net/1885/19951
Source: Plasma Sources Science and Technology
DOI: 10.1088/0963-0252/16/2/002

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