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Ordering of Ge islands on Si(001) substrates patterned by nanoindentation

Persichetti, Luca; Ruffell, Simon; Capasso, A; Sgarlata, A; Fanfoni, M; Motta, N; Balzarotti, A


Spatial organization of Ge islands, grown by physical vapor deposition, on prepatterned Si(001) substrates has been investigated. The substrates were patterned prior to Ge deposition by nanoindentation. Characterization of Ge dots is performed by atomic force microscopy and scanning electron microscopy. The nanoindents act as trapping sites, allowing ripening of Ge islands at those locations during subsequent deposition and diffusion of Ge on the surface. The results show that island ordering...[Show more]

CollectionsANU Research Publications
Date published: 2011
Type: Journal article
Source: Thin Solid Films
DOI: 10.1016/j.tsf.2011.01.390


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